Lam Research 810-072687-004 Rev
716-077262-004 / RING, EDGE,
716-030135-001 / FOCUS RING
716-331089-001 /CERAMIC
LAM 853-800749-015
Lam Research 810-013872-002 Rev J
853-900986-101 / INDUSTRIAL PC
810-046015-009 / PCB ASSY
715-011531-008 / ELECTRODE
Lam Research 716-014843-353