Size |
1/2″, 3/4″ |
Cv Value |
3.5 |
Max. Working Pressure (G.) |
1.5MPa |
Operating Pressure (G.) |
0.5~0.7MPa |
Max. Working Temp. |
-10℃ ~ 65℃ |
Internal Leakage Allowance (He) |
1x10-10 Pa · ㎥/s |
Test Pressure ≤ 1×10-2 Torr | |
Holding Time ≥ 15 sec. | |
External Leakage Allowance (He) |
1x10-10 Pa · ㎥/s |
Test Pressure ≤ 1×10-2 Torr | |
Holding Time ≥ 1 min. | |
Particle Inspection (EP only) |
No count |
Pressure : 60~80psi N2 Gas | |
Sample Volume : 1CFM | |
0.1㎛ and Larger |